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This Japanese Industrial Standard specifies the method for estimation of boron in the silicon rod for semiconductor. The concentration of boron is estimated from the electric resistivity of the sample for which floating zone operation, hereinafter referred to as the 'zone', is carried out.
Author | JSA |
---|---|
Editor | JSA |
Document type | Standard |
Format | File |
Confirmation date | 2014-10-20 |
ICS | 29.045 : Semiconducting materials
77.120.99 : Other non-ferrous metals and their alloys |
Number of pages | 3 |
Year | 1970 |
Document history | |
Country | Japan |
Keyword | JIS 0607;0607;JIS H 0607-1978 |