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ISO/TS 22933:2022
M00008991
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ISO/TS 22933:2022 Surface chemical analysis - Secondary ion mass spectrometry - Method for the measurement of mass resolution in SIMS
standard by International Organization for Standardization (Technical Standard), 04/01/2022
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Full Description
This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.