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M00008849
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ISO 14644-9:2022
Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentrationstandard by International Organization for Standardization, 05/01/2022
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This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D.
This document applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The procedure for the assessment of surface cleanliness by particle concentration (SCP) is limited to particles of between 0,05 m and 500 m.The following issues are not considered in this document: requirements for the cleanliness and suitability of surfaces for specific processes;